X’Pert³ MRD and MRD (XL)

Another type of materials research diffractrometer that is used for X-ray scattering studies in advanced materials science, scientific and industrial thin film technology and metrological characterization in semiconductor process development. Its improved analytical capability is attributable to the improved performance and reliability. It has different systems and versions that can meet the diversified analysis requirements ranging from “X’Pert³ MRD, X'Pert³ MRD XL, X'Pert³ Extended MRD (XL) and X'Pert³ MRD (XL) In-plane”. The advanced technologies used lead to system flexibility where it can upgrade new development to the system.

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